dual damascene

基本解釋

The invention provides a method for forming a groove and a dual damascene structure.
本發(fā)明提出一種形成溝槽及雙鑲嵌結(jié)構(gòu)的方法。
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The invention can reduce the formation of depression on the side walls of the groove contained in the dual-damascene structure;
可減少形成于所述雙鑲嵌結(jié)構(gòu)內(nèi)包含的溝槽側(cè)壁上的凹陷的產(chǎn)生；
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In this paper, we propose the investigation of the void in dual damascene process and the hole and trench with large aspect ratios between width and height.
本論文主要針對雙層鑲嵌制程所造成的孔隙及具有高深寬比的極窄和極深的通孔和溝槽所造成的影響加以探討及研究。