etching paper

基本解釋

This paper designs an etching system with constant temperature for etching process in MEMS manufacture.
本文設(shè)計(jì)了一個(gè)恒溫腐蝕系統(tǒng)，用于微機(jī)械加工制作中的腐蝕工藝。
Based on electrochemical etching principles, the paper fabricated the micrometer scale wire electrodes used in WEMM.
本文基于電化學(xué)腐蝕原理，制備微細(xì)電化學(xué)線切割加工中使用的微米尺度線電極。
A technique for the fabrication of silicon cone cathode array by using anisotropic and isotropic etching has been reported in this paper.
詳細(xì)研究了利用硅的各向異性腐蝕、各向同性腐蝕制備硅錐陰極陣列的工藝。