ion pump

基本解釋

A composite pump was developed which is composed of a nonevaporable getter pump and a sputtering ion pump.
結合消氣劑和離子泵的各自優(yōu)缺點,研制了一種由非蒸散型消氣劑泵與冷陰極濺射離子泵組成的復合泵。
The electron gun,accelerator structure and klystron of accelerator operate under high vacuum condition.This article introduces the principle,structure and maintenance of Titanium sputtering ion pump.
加速器的電子槍、加速管和速調管等器件要求在高真空條件下工作。本文介紹加速中的鈦濺射離子泵的原理、結構和維護方法。
The testing technique and system of the newly developed, miniaturized sputtering ion pump with low pumping speed has been developed in accordance with the standards formulated by machine industry.
摘要本文介紹了小抽速微型濺射離子泵的性能測試系統(tǒng)和參考機械行業(yè)標準確定的測試方法，探討了測量結果誤差來源。
Newly-Developed Miniaturized Compound Sputtering Ion Pump
微型復合濺射離子泵的設計研究
Experimental Evaluation of Miniature Sputtering Ion Pump
微型濺射離子泵性能測試