wafer leveling

基本解釋

The Test Bench built for Wafer Focusing and Leveling Sensor is to measure and evaluate its performance.
硅片調(diào)焦調(diào)平測(cè)量系統(tǒng)測(cè)試平臺(tái)用于對(duì)光刻機(jī)硅片調(diào)焦調(diào)平測(cè)量系統(tǒng)的性能進(jìn)行檢測(cè)。
Image quality is the key performance of the optical lithography tool and it relies on the performance of wafer focusing and leveling measurement system.
成像質(zhì)量是光學(xué)光刻機(jī)的最主要指標(biāo)，硅片調(diào)焦調(diào)平測(cè)量是光刻機(jī)控制成像質(zhì)量的基礎(chǔ)。