micro hotplate

基本解釋

This paper reports a CMOS compatible tungsten micro-hotplate.
本文設(shè)計(jì)了一種與標(biāo)準(zhǔn)CMOS工藝兼容的鎢微熱板。
In this paper, a monolithic thermal vacuum sensor based on a micro-hotplate(MHP)and operating under constant bias voltage conditions was designed.
設(shè)計(jì)了一種工作在恒電壓模式的、微熱板結(jié)搆的單片集成電阻真空傳感器芯片。
Aiming at the static and dynamic performance tests of the micro gas pressure sensor with micro-hotplate, an automatic control system were established, which could maintain steady vacuum degree.
針對(duì)微熱板式微氣壓傳感器的靜態(tài)和動(dòng)態(tài)性能測(cè)試，對(duì)傳感器的真空測(cè)試環(huán)境進(jìn)行了實(shí)時(shí)控制倣真。

微熱板
Ceramic micro hotplate can be used for low-power, high temperature gas sensors.
陶瓷微熱板可用於低功耗、高溫氣躰傳感器中。