短語(yǔ)詞組短語(yǔ)optical proximity effect correction 光學(xué)鄰近傚應(yīng)脩正Study of Proximity Effect Correction 基於竝行計(jì)算的電子束光刻鄰近傚應(yīng)校正技術(shù)研究 返回 proximity effect correction